Patent Assignment
Reel/Frame 026623/0639
Assignment of Assignor's Interest
Recorded: 2011-07-20
Received: 2011-07-20
Pages: 3
Assignor
BARTLETT, ALLEN J.
Executed: 2011-06-01
Assignee
BROOKS AUTOMATION, INC.
15 ELIZABETH DRIVE, BUILDING 11, CHELMSFORD, MA, 01824, UNITED STATES
Covered Property
(1)
Process Chamber with Integrated Pumping
Application:
13/111,149 →