Patent Assignment
Reel/Frame 026805/0974
Assignment of Assignor's Interest
Recorded: 2011-08-25
Pages: 2
Assignee
TOKYO ELECTRON LIMITED
AKASAKA BIZ TOWER, 3-1 AKASAKA 5-CHOME, MINATO-KU, TOKYO, 107-6325, JAPAN
Covered Property
(1)
Method for Etching High-K Dielectric Using Pulsed Bias Power