Patent Assignment
Reel/Frame 026877/0466
Assignment of Assignor's Interest
Recorded: 2011-09-09
Pages: 2
Assignor
NAKAMURA, KAZUKI
Executed: 2011-08-16
Assignee
DAINIPPON SCREEN MFG. CO., LTD.
TENJINKITA-CHO 1-1, TERANOUCHI-AGARU 4-CHOME, HORIKAWA-DORI, KAMIGYO-KU, KYOTO-SHI, KYOTO, 602-8585, JAPAN
Covered Property
(1)
Substrate Treatment Method and Substrate Treatment Apparatus