Patent Assignment
Reel/Frame 026927/0685
Assignment of Assignor's Interest
Recorded: 2011-09-19
Pages: 4
Assignors
WU, LIQI
Executed: 2011-08-26
KARIM, ISHTAK
Executed: 2011-08-26
QIU, HUATAN
Executed: 2011-08-26
PARK, KIE-JIN
Executed: 2011-08-26
ZHOU, CHUNMING
Executed: 2011-08-26
COLINJIVADI, KARTHIK
Executed: 2011-08-26
Assignee
NOVELLUS SYSTEMS INC.
4000 N. FIRST STREET, SAN JOSE, CALIFORNIA, 95134
Covered Property
(1)
Creation of Magnetic Field (Vector Potential) Well for Improved Plasma Deposition and Resputtering Uniformity
Application:
13/224,077 →
Publication:
US 2012/0070589