Assignment of Assignor's Interest

Recorded: 2011-09-21 Pages: 4

Assignors

LAYH, MICHAEL

Executed: 2011-09-17

DINGER, UDO

Executed: 2011-09-12

Assignee

CARL ZEISS SMT GMBH

RUDOLF-EBER-STRASSE 2, OBERKOCHEN, 73447, GERMANY

Covered Property (1)

EUV COLLECTOR With Cooling Device

Patent: 9,007,559 →

Application: 13/214,470 →

Publication: US 2012/0050703