Patent Assignment
Reel/Frame 027060/0960
Assignment of Assignor's Interest
Recorded: 2011-10-14
Pages: 4
Assignee
OERLIKON SOLAR AG, TRUBBACH
HAUPTSTRASSE 1A, TRUBBACH, 9477, SWITZERLAND
Covered Property
(1)
Plasma Processing Apparatus and Method for the Plasma Processing of Substrates
Application:
13/128,265 →
Publication:
US 2011/0272099
Related Assignments
(2)
Other recorded transfers of the patent in this record — the chain of ownership.