Patent Assignment
Reel/Frame 027065/0051
Assignment of Assignor's Interest
Recorded: 2011-10-14
Pages: 4
Assignors
WATANABE, KENJI
Executed: 2011-07-24
HATAKEYAMA, MASAHIRO
Executed: 2011-07-22
NAITO, YOSHIHIKO
Executed: 2011-07-15
KOHAMA, TATSUYA
Executed: 2011-07-15
TERAO, KENJI
Executed: 2011-07-22
MURAKAMI, TAKESHI
Executed: 2011-07-15
HAYASHI, TAKEHIDE
Executed: 2011-08-01
TSUKAMOTO, KIWAMU
Executed: 2011-07-15
SOBUKAWA, HIROSHI
Executed: 2011-07-15
KIMURA, NORIO
Executed: 2011-07-22
Assignee
EBARA CORPORATION
11-1, HANEDA ASAHI-CHO, OHTA-KU,, TOKYO, 144-8510, JAPAN
Covered Property
(1)
Electro-Optical Inspection Apparatus and Method with Dust or Particle Collection Function