Patent Assignment
Reel/Frame 027107/0626
Change of Assignee's Address
Recorded: 2011-10-24
Received: 2011-10-24
Pages: 14
Assignor
XTREME TECHNOLOGIES GMBH
Executed: 2010-10-08
Assignee
XTREME TECHNOLOGIES GMBH
15 STEINBACHSTRASSE, AACHEN, DEX, 52074, GERMANY
Covered Property
(1)
Method and Apparatus for Generating High Output Power Gas Discharge Based Source of Extreme Ultraviolet Radiation and/or Soft X-Rays
Application:
10/109,581 →