Patent Assignment
Reel/Frame 027162/0261
Assignment of Assignor's Interest
Recorded: 2011-11-02
Pages: 3
Assignee
SEMEQUIP, INC.
34 SULLIVAN ROAD, NORTH BILLERICA, ILLINOIS, 01862-2000
Covered Property
(1)
Ion Implantation Device and a Method of Semiconductor Manufacturing by the Implantation of Boron Hydride Cluster Ions
Related Assignments
(1)
Other recorded transfers of the patent in this record — the chain of ownership.