Patent Assignment
Reel/Frame 027229/0289
Assignment of Assignor's Interest
Recorded: 2011-11-15
Pages: 4
Assignors
GOMI, ATSUSHI
Executed: 2011-09-15
MIZUSAWA, YASUSHI
Executed: 2011-09-15
HATANO, TATSUO
Executed: 2011-09-15
HARA, MASAMICHI
Executed: 2011-09-15
YAMAMOTO, KAORU
Executed: 2011-09-15
TAGA, SATOSHI
Executed: 2011-09-15
YASUMURO, CHIAKI
Executed: 2011-09-15
Assignee
TOKYO ELECTRON LIMITED
AKASAKA BIZ TOWER, 3-1, AKASAKA 5-CHOME, MINATO-KU, TOKYO, 107-6325, JAPAN
Covered Property
(1)
Mounting Table Structure, Film Forming Apparatus and Raw Material Recovery Method