Patent Assignment
Reel/Frame 027274/0688
Assignment of Assignor's Interest
Recorded: 2011-11-23
Pages: 5
Assignee
TAIWAN SEMICONDUCTOR MANUFACTURING CO., LTD.
NO. 8, LI-HSIN RD. 6, HSIN-CHU SCIENCE PARK, HSIN-CHU, 300-77, TAIWAN
Covered Property
(1)
Novel Mechanism for Mems Bump Side Wall Angle Improvement