Patent Assignment
Reel/Frame 027309/0339
Assignment of Assignor's Interest
Recorded: 2011-12-01
Pages: 2
Assignors
MARAKHTANOV, ALEXEI
Executed: 2011-11-21
DHINDSA, RAJINDER
Executed: 2011-11-21
LUCCHESI, KEN
Executed: 2011-11-21
Assignee
LAM RESEARCH CORPORATION
4650 CUSHING PARKWAY, FREMONT, CALIFORNIA, 94538
Covered Property
(1)
System, Method and Apparatus for Detecting Dc Bias in a Plasma Processing Chamber