Patent Assignment
Reel/Frame 027426/0616
Assignment of Assignor's Interest
Recorded: 2011-12-21
Pages: 2
Assignee
DAINIPPON SCREEN MFG. CO., LTD.
TENJINKITA-CHO 1-1, TERANOUCHI-AGARU 4-CHOME, HORIKAWA-DORI, KAMIGYO-KU, KYOTO-SHI, KYOTO, 602-8585, JAPAN
Covered Property
(1)
Apparatus for and Method of Heat-Treating Thin Film on Surface of Substrate
Related Assignments
(1)
Other recorded transfers of the patent in this record — the chain of ownership.