Release of Security Interest

Recorded: 2011-12-30 Received: 2011-12-30 Pages: 6

Assignor

Executed: 2011-12-30

Assignee

ICHOR SYSTEMS, INC.

9660 SW HERMAN ROAD, TUALATIN, OR, 97062, UNITED STATES

Covered Properties (11)

System and Method for Processing High Purity Materials

Application: 11/778,806 →

System and Method for Delivering Chemicals

Application: 11/778,809 →

Modular Substrate Gas Panel Having Manifold Connections in a Common Plane

Application: 11/232,031 →

Method and Apparatus for Blending Process Materials

Application: 10/343,360 →

Modular Substrate Gas Panel Having Manifold Connections in a Common Plane

Application: 10/650,102 →

Method and Apparatus for Blending Process Materials

Application: 10/623,137 →

Fluid Flow System

Application: 10/147,427 →

System and Method for Integrating Gas Components

Application: 10/010,372 →

System and Method for Integrating Gas Components

Application: 09/961,595 →

Gas Panel

Application: 09/939,487 →

Method and Apparatus for Blending Process Materials

Application: 09/919,772 →