Release of Security Interest

Recorded: 2012-01-19 Received: 2012-01-19 Pages: 6

Assignor

THE BANK OF NEW YORK MELLON

Executed: 2012-01-19

Assignee

ICHOR SYSTEMS, INC.

200-C PARKER DRIVE, SUITE 600, AUSTIN, TX, 78728, UNITED STATES

Covered Properties (6)

Modular Substrate Gas Panel Having Manifold Connections in a Common Plane

Application: 11/232,031 →

Modular Substrate Gas Panel Having Manifold Connections in a Common Plane

Application: 10/650,102 →

Fluid Flow System

Application: 10/147,427 →

System and Method for Integrating Gas Components

Application: 10/010,372 →

System and Method for Integrating Gas Components

Application: 09/961,595 →

Gas Panel

Application: 09/939,487 →