Patent Assignment
Reel/Frame 027675/0718
Assignment of Assignor's Interest
Recorded: 2012-02-09
Pages: 3
Assignor
KAMIKUBO, TAKASHI
Executed: 2012-01-30
Assignee
NUFLARE TECHNOLOGY, INC.
2068-3, OOKA, NUMAZU-SHI, SHIZUOKA, 410-8510, JAPAN
Covered Property
(1)
Charged Particle Beam Writing Apparatus and Charged Particle Beam Writing Method