Patent Assignment
Reel/Frame 027696/0297
Assignment of Assignor's Interest
Recorded: 2012-02-13
Pages: 3
Assignee
D2S, INC.
4040 MOORPARK AVENUE, #250, SAN JOSE, CALIFORNIA, 95117
Covered Property
(1)
Method and System for Forming High Precision Patterns Using Charged Particle Beam Lithography