Patent Assignment
Reel/Frame 027755/0304
Assignment of Assignor's Interest
Recorded: 2012-02-24
Pages: 3
Assignor
OZAWA, KIMITAKA
Executed: 2011-11-08
Assignee
CANON KABUSHIKI KAISHA
30-2, SHIMOMARUKO 3-CHOME, OHTA-KU, TOKYO, 146-8501, JAPAN
Covered Property
(1)
Charged Particle Beam Drawing Apparatus and Article Manufacturing Method Using Same