Patent Assignment
Reel/Frame 027756/0436
Assignment of Assignor's Interest
Recorded: 2012-02-24
Pages: 3
Assignors
YAMAZAKI, SHUNPEI
Executed: 2012-02-13
KOEZUKA, JUNICHI
Executed: 2012-02-07
HANAOKA, KAZUYA
Executed: 2012-02-14
Assignee
SEMICONDUCTOR ENERGY LABORATORY CO., LTD.
398, HASE, ATSUGI-SHI, KANAGAWA-KEN, 243-0036, JAPAN
Covered Property
(1)
Method for Manufacturing Soi Substrate