Patent Assignment
Reel/Frame 027768/0800
Assignment of Assignor's Interest
Recorded: 2012-02-27
Pages: 2
Assignors
HATAKEYAMA, JUN
Executed: 2012-01-27
NAGATA, TAKESHI
Executed: 2012-01-27
MORISAWA, TAKU
Executed: 2012-01-27
Assignee
SHIN-ETSU CHEMICAL CO., LTD.
6-1, OHTEMACHI 2-CHOME, CHIYODA-KU, TOKYO, JAPAN
Covered Property
(1)
Positive Resist Composition and Patterning Process