Patent Assignment
Reel/Frame 027795/0709
Assignment of Assignor's Interest
Recorded: 2012-03-02
Pages: 4
Assignee
TOKYO ELECTRON LIMITED
3-1, AKASAKA 5-CHOME, MINATO-KU,, TOKYO, 107-6325, JAPAN
Covered Property
(1)
Substrate Transport Apparatus, Substrate Transport Method, and Recording Medium