Patent Assignment
Reel/Frame 027826/0759
Assignment of Assignor's Interest
Recorded: 2012-03-08
Pages: 2
Assignee
FUJITSU LIMITED
1-1, KAMIKODANAKA 4-CHOME, NAKAHARA-KU,, KAWASAKI-SHI, KANAGAWA, 211-8588, JAPAN
Covered Property
(1)
Etching Method, Method for Manufacturing Semiconductor Device, and Etching Device
Related Assignments
(2)
Other recorded transfers of the patent in this record — the chain of ownership.