Patent Assignment
Reel/Frame 027844/0738
Assignment of Assignor's Interest
Recorded: 2012-03-06
Pages: 4
Assignor
BROOKS AUTOMATION, INC.
Executed: 2010-02-02
Assignee
MURATA MACHINERY, LTD.
3 MINAMI OCHIAI-CHO, KISSHOIN, MINAMI-KU, KYOTO-SHI, KYOTO 601-8326, JAPAN
Covered Property
(1)
Automated Material Handling System for Semiconductor Manufacturing Based on a Combination of Vertical Carousels and Overhead Hoists