Patent Assignment
Reel/Frame 027891/0378
Assignment of Assignor's Interest
Recorded: 2012-03-20
Pages: 4
Assignors
SUZUKI, KEISUKE
Executed: 2012-03-19
CHOU, PAO-HWA
Executed: 2012-03-19
CHANG, TE CHING
Executed: 2012-03-19
Assignee
TOKYO ELECTRON LIMITED
3-1, AKASAKA 5-CHOME, MINATO-KU,, TOKYO, 107-6325, JAPAN
Covered Property
(1)
Film Deposition Method and Apparatus