Patent Assignment
Reel/Frame 027903/0118
Assignment of Assignor's Interest
Recorded: 2012-03-21
Pages: 3
Assignors
FUJINO, YUTAKA
Executed: 2012-03-12
UEDA, ATSUSHI
Executed: 2012-03-12
OZAKI, SHIGENORI
Executed: 2012-03-12
KITAGAWA, JUNICHI
Executed: 2012-03-12
Assignee
TOKYO ELECTRON LIMITED
AKASAKA BIZ TOWER, 3-1, AKASAKA 5-CHOME, MINATO-KU, TOKYO, 107-6325, JAPAN
Covered Property
(1)
Plasma Processing Apparatus and Microwave Introduction Device