Patent Assignment
Reel/Frame 027917/0370
Assignment of Assignor's Interest
Recorded: 2012-03-23
Pages: 3
Assignee
L'AIR LIQUIDE, SOCIETE ANONYME POUR L'ETUDE ET L'EXPLOITATION DES PROCEDES GEORGES CLAUDE
75 QUAI D'ORSAY, PARIS, F-75007, FRANCE
Covered Property
(1)
Deposition of Group Iv Metal-Containing Films at High Temperature