Patent Assignment
Reel/Frame 028127/0843
Assignment of Assignor's Interest
Recorded: 2012-04-30
Pages: 3
Assignors
WATANABE, TSUKASA
Executed: 2012-04-06
EGASHIRA, KEISUKE
Executed: 2012-04-06
KANEKO, MIYAKO
Executed: 2012-04-02
ORII, TAKEHIKO
Executed: 2012-04-02
Assignee
TOKYO ELECTRON LIMITED
3-1, AKASAKA 5-CHOME, MINATO-KU, TOKYO-TO, JAPAN
Covered Property
(1)
Etching Method, Etching Apparatus and Storage Medium