Patent Assignment
Reel/Frame 028183/0718
Assignment of Assignor's Interest
Recorded: 2012-05-09
Pages: 3
Assignors
ROY, SHAMBHU N.
Executed: 2012-05-09
BURKHART, VINCENT E.
Executed: 2012-05-09
FIELDS, SCOTT J.
Executed: 2012-05-09
Assignee
NOVELLUS SYSTEMS, INC.
4000 NORTH FIRST STREET, SAN JOSE, CALIFORNIA, 95134
Covered Property
(1)
High Temperature Electrostatic Chuck with Radial Thermal Chokes