Patent Assignment
Reel/Frame 028209/0358
Assignment of Assignor's Interest
Recorded: 2012-05-15
Pages: 5
Assignors
COLONNA DE LEGA, XAVIER
Executed: 2010-10-12
DE GROOT, PETER J.
Executed: 2010-10-06
LIESENER, JAN
Executed: 2010-10-04
Assignee
ZYGO CORPORATION
21 LAUREL BROOK ROAD, MIDDLEFIELD, CONNECTICUT, 06455-0448
Covered Property
(1)
Interferometric Methods for Metrology of Surfaces, Films and Underresolved Structures