Patent Assignment
Reel/Frame 028240/0969
Assignment of Assignor's Interest
Recorded: 2012-05-21
Pages: 7
Assignors
VUKKADALA, PRADEEP
Executed: 2012-05-21
VEERARAGHAVAN, SATHISH
Executed: 2012-05-21
SINHA, JAYDEEP K.
Executed: 2012-05-21
Assignee
KLA-TENCOR CORPORATION
ONE TECHNOLOGY DRIVE, MILPITAS, CALIFORNIA, 95035
Covered Property
(1)
Overlay and Semiconductor Process Control Using a Wafer Geometry Metric