Patent Assignment
Reel/Frame 028241/0693
Assignment of Assignor's Interest
Recorded: 2012-05-21
Pages: 3
Assignee
SHIN-ETSU CHEMICAL CO., LTD.
6-1, OHTEMACHI 2-CHOME, CHIYODA-KU, TOKYO, JAPAN
Covered Property
(1)
Method for Manufacturing Micro-Structure and Optically Patternable Sacrificial Film-Forming Composition