Patent Assignment
Reel/Frame 028260/0668
Confirmatory License
Recorded: 2012-05-23
Pages: 2
Assignor
MASSACHUSETTS INSTITUTE OF TECHNOLOGY
Executed: 2012-02-16
Assignee
NATIONAL SCIENCE FOUNDATION
4201 WILSON BLVD, ROOM 1265, ARLINGTON, VIRGINIA, 22230
Covered Property
(1)
Method and Apparatus for Controlling Film Deposition
Application:
13/080,626 →
Publication:
US 2011/0181644