Patent Assignment
Reel/Frame 028365/0482
Assignment of Assignor's Interest
Recorded: 2012-06-13
Pages: 2
Assignor
HIGASHIJIMA, JIRO
Executed: 2012-06-08
Assignee
TOKYO ELECTRON LIMITED
3-1 AKASAKA 5-CHOME, MINATO-KU, TOKYO 107-6325, JAPAN
Covered Property
(1)
Liquid Processing Apparatus and Liquid Processing Method