Patent Assignment
Reel/Frame 028376/0637
Assignment of Assignor's Interest
Recorded: 2012-06-14
Pages: 2
Assignee
DAINIPPON SCREEN MFG. CO.. LTD.
TENJINKITA-MACHI 1-1, TERANOUCHI-AGARU 4-CHOME, HORIKAWA-DORI, KAMIGYO-KU, KYOTO-SHI, KYOTO, 602-8585, JAPAN
Covered Property
(1)
Substrate Processing Method and Substrate Processing Apparatus
Application:
13/523,186 →
Publication:
US 2013/0014785
Related Assignments
(1)
Other recorded transfers of the patent in this record — the chain of ownership.