Patent Assignment
Reel/Frame 028389/0751
Assignment of Assignor's Interest
Recorded: 2012-06-18
Pages: 3
Assignors
TAKAHASHI, CHIKAKO
Executed: 2012-04-26
SUZUKI, TAKASHI
Executed: 2012-04-30
HORIGUCHI, MASATO
Executed: 2012-05-08
YAMAMOTO, TAKASHI
Executed: 2012-05-09
Assignee
TOKYO ELECTRON LIMITED
3-1, AKASAKA 5-CHOME, MINATO-KU, TOKYO, 107-6325, JAPAN
Covered Property
(1)
Electrode Assembly and Plasma Processing Apparatus