Patent Assignment
Reel/Frame 028410/0423
Assignment of Assignor's Interest
Recorded: 2012-06-20
Pages: 2
Assignee
DAINIPPON SCREEN MFG. CO., LTD.
TENJINKITA-MACHI 1-1, TERANOUCHI-AGARU 4-CHOME, HORIKAWA-DORI, KAMIGYO-KU, KYOTO-SHI, KYOTO, 602-8585, JAPAN
Covered Property
(1)
Substrate Processing Apparatus, Substrate Processing Method, and Nozzle
Application:
13/527,803 →
Publication:
US 2013/0052360
Related Assignments
(1)
Other recorded transfers of the patent in this record — the chain of ownership.