Patent Assignment
Reel/Frame 028426/0481
Assignment of Assignor's Interest
Recorded: 2012-06-22
Pages: 2
Assignor
CHIBA, YUKI
Executed: 2012-06-21
Assignee
TOKYO ELECTRON LIMITED
AKASAKA BIZ TOWER, 3-1 AKASAKA 5-CHOME, MINATO-KU, TOKYO, 107-6325, JAPAN
Covered Property
(1)
Sidewall Protection of Low-K Material During Etching and Ashing