Patent Assignment
Reel/Frame 028439/0628
Assignment of Assignor's Interest
Recorded: 2012-06-25
Pages: 2
Assignors
NAM, SANG KI
Executed: 2012-03-21
DHINDSA, RAJINDER
Executed: 2012-03-21
MARAKHTANOV, ALEXEI
Executed: 2012-03-21
Assignee
LAM RESEARCH CORPORATION
4650 CUSHING PARKWAY, FREMONT, CALIFORNIA, 94538
Covered Property
(1)
Methods and Apparatus for Selectively Modifying Rf Current Paths in a Plasma Processing System