Patent Assignment
Reel/Frame 028485/0690
Assignment of Assignor's Interest
Recorded: 2012-07-03
Pages: 2
Assignor
SHIBATA, HIDEKI
Executed: 2012-06-20
Assignee
DAINIPPON SCREEN MFG. CO., LTD.
TENJINKITA-MACHI 1-1, TERANOUCHI-AGARU 4 -CHOME,, HORIKAWA-DORI, KAMIGYO-KU,, KYOTO, 602-8585, JAPAN
Covered Property
(1)
Control Apparatus, a Substrate Treating Method, a Substrate Treating System, a Method of Operating a Substrate Treating System, a Load Port Control Apparatus, and a Substrate Treating System Having the Load Port Control Apparatus
Related Assignments
(1)
Other recorded transfers of the patent in this record — the chain of ownership.