Patent Assignment
Reel/Frame 028514/0087
Assignment of Assignor's Interest
Recorded: 2012-07-09
Pages: 2
Assignors
URATA, SHINGO
Executed: 2012-04-27
TAKI, AKIHIKO
Executed: 2012-05-15
TSUJIKAWA, HIROKI
Executed: 2012-05-15
FUJITA, ERI
Executed: 2012-05-16
FUJITANI, YOSHIYUKI
Executed: 2012-05-15
Assignee
DAINIPPON SCREEN MFG. CO., LTD.
TENJINKITA-MACHI 1-1, TERANOUCHI-AGARU 4-CHOME,, HORIKAWA-DORI, KAMIGYO-KU, KYOTO-SHI, KYOTO, 602-8585, JAPAN
Covered Property
(1)
Substrate Processing Apparatus and Substrate Processing Method
Application:
13/544,207 →
Publication:
US 2013/0014787
Related Assignments
(1)
Other recorded transfers of the patent in this record — the chain of ownership.