Patent Assignment
Reel/Frame 028776/0029
Assignment of Assignor's Interest
Recorded: 2012-08-13
Pages: 3
Assignors
COENE, WILLEM MARIE JULIA MARCEL
Executed: 2012-07-31
VAN HAVER, SVEN
Executed: 2012-07-31
Assignee
ASML NETHERLANDS B.V.
DE RUN 6501, VELDHOVEN, NL - 5504 DR, NETHERLANDS
Covered Property
(1)
Methods and Patterning Devices for Measuring Phase Aberration