Patent Assignment
Reel/Frame 028817/0352
Assignment of Assignor's Interest
Recorded: 2012-08-21
Pages: 2
Assignors
YASUI, NAOKI
Executed: 2012-07-23
IKEDA, NORIHIKO
Executed: 2012-07-23
ARAMAKI, TOORU
Executed: 2012-07-23
NISHIMORI, YASUHIRO
Executed: 2012-07-23
Assignee
HITACHI HIGH-TECHNOLOGIES CORPORATION
24-14, NISHI SHIMBASHI 1-CHOME,, MINATO-KU, TOKYO, JAPAN
Covered Property
(1)
Plasma Processing Apparatus and Method
Application:
13/590,242 →
Publication:
US 2014/0011365