Patent Assignment
Reel/Frame 028831/0404
Assignment of Assignor's Interest
Recorded: 2012-08-22
Pages: 4
Assignors
KOFUJI, NAOYUKI
Executed: 2012-07-17
YOKOGAWA, KEN'ETSU
Executed: 2012-07-19
NEGISHI, NOBUYUKI
Executed: 2012-07-17
KAMIBAYASHI, MASAMI
Executed: 2012-07-18
MIYAKE, MASATOSHI
Executed: 2012-07-17
Assignee
HITACHI HIGH-TECHNOLOGIES CORPORATION
24-14, NISHI SHIMBASHI 1-CHOME, MINATO-KU, TOKYO, JAPAN
Covered Property
(1)
Plasma Etching Apparatus
Application:
13/592,129 →
Publication:
US 2013/0087285