Patent Assignment
Reel/Frame 028869/0565
Assignment of Assignor's Interest
Recorded: 2012-08-29
Pages: 3
Assignee
CANON ANELVA CORPORATION
2-5-1, KURIGI, ASAO-KU, KAWASAKI-SHI, 215-8550, JAPAN
Covered Property
(1)
Electronic Device Manufacturing Method and Sputtering Method