Patent Assignment
Reel/Frame 028907/0496
Assignment of Assignor's Interest
Recorded: 2012-09-06
Pages: 8
Assignors
BASEMAN, ROBERT JEFFREY
Executed: 2012-08-20
HE, JINGRUI
Executed: 2012-07-31
YASCHIN, EMMANUEL
Executed: 2012-07-30
ZHU, YADA
Executed: 2012-08-01
Assignee
INTERNATIONAL BUSINESS MACHINES CORPORATION
NEW ORCHARD ROAD, ARMONK, NEW YORK, 10504
Covered Property
(1)
Run-To-Run Control Utilizing Virtual Metrology in Semiconductor Manufacturing