Patent Assignment
Reel/Frame 028999/0309
Assignment of Assignor's Interest
Recorded: 2012-09-20
Pages: 2
Assignee
LAM RESEARCH CORPORATION
4650 CUSHING PARKWAY, FREMONT, CALIFORNIA, 94538
Covered Property
(1)
Frequency Enhanced Impedance Dependent Power Control for Multi-Frequency Rf Pulsing