Patent Assignment
Reel/Frame 029081/0810
Assignment of Assignor's Interest
Recorded: 2012-10-05
Pages: 4
Assignor
BASSOM, NEIL J.
Executed: 2012-10-04
Assignee
VARIAN SEMICONDUCTOR EQUIPMENT ASSOCIATES, INC.
35 DORY ROAD, GLOUCESTER, MASSACHUSETTS, 01930
Covered Property
(1)
Method and Apparatus for Thermal Control of Ion Sources and Sputtering Targets