Patent Assignment
Reel/Frame 029122/0483
Assignment of Assignor's Interest
Recorded: 2012-10-12
Pages: 2
Assignors
BRUGGER, MICHAEL
Executed: 2012-10-01
LACH, OTTO
Executed: 2012-10-01
POSTEL, OLIVIER
Executed: 2012-10-02
Assignee
LAM RESEARCH AG
SEZ STRASSE 1, VILLACH, A-9500, AUSTRIA
Covered Property
(1)
Method and Apparatus for Liquid Treatment of Wafer Shaped Articles