Patent Assignment
Reel/Frame 029147/0234
Assignment of Assignor's Interest
Recorded: 2012-10-17
Pages: 2
Assignors
NINOMIYA, SHIRO
Executed: 2012-10-02
TSUKIHARA, MITSUKUNI
Executed: 2012-10-02
KUDO, TETSUYA
Executed: 2012-10-02
YAMADA, TATSUYA
Executed: 2012-10-02
Assignee
SEN CORPORATION
1-1, OSAKI 2-CHOME, SHINAGAWA-KU, TOKYO, JAPAN
Covered Property
(1)
Ion Implantation Apparatus and Ion Implantation Method