Patent Assignment
Reel/Frame 029150/0598
Assignment of Assignor's Interest
Recorded: 2012-10-18
Pages: 3
Assignors
DRAEGER, NERISSA
Executed: 2012-06-12
SHANNON, KARENA
Executed: 2012-06-21
VAN SCHRAVENDIJK, BART
Executed: 2012-06-20
ASHTIANI, KAIHAN
Executed: 2012-06-20
Assignee
NOVELLUS SYSTEMS, INC.
4000 NORTH FIRST STREET, SAN JOSE, CALIFORNIA, 95134
Covered Property
(1)
Flowable Oxide Film with Tunable Wet Etch Rate